V. Ciupina1,2, R. Vladoiu1,2, C. P. Lungu3, C. Porosnicu3, G. C. Prodan1, E. Vasile4, A. Mandes1, V. Dinca1. A. Velea5, V. Nicolescu6
Abstract. Nanostructured titanium-carbon nanostructured thin films were prepared using the Thermionic Vacuum Arc (TVA) technology in different configurations under a varied number of Ti/C combinations at high base pressure of 1 × 10–6Torr with and without graded compositions. The layers consisting of about 100nm Carbon base layer and seven 40nm alternatively Ti and C layers were deposited on Silicon substrates. On the other hand, in order to obtain C-Ti multilayer structures with variable thickness and different percentages in C and Ti of layers, a 20nm thick C layer was first deposed on Si substrate and then seven Ti-C layers, each of these having thickness of up to 40nm were deposed. To perform the successively layers with various thickness were changed the discharge parameters for C and Ti plasma sources to obtain the desirable thickness. By changing of substrate temperature between room temperature and 300°C and on the other hand the bias voltage up to -700V, different batches of samples were obtained for this study. The films were characterized by surface morphology, and microstructure, through Rutherford Backscattering Spectrometry (RBS), Raman Spectroscopy, Transmission Electron Microscopy (TEM), Grazing Incidence X-ray diffraction (GIXRD). Tribological and electrical measurements are also presented.
Keywords: TVA, C–Ti multilayer, EDX, XPS, tribological properties, electrical properties, TEM, STEM
DOI 10.56082/annalsarsciphyschem.2022.1.107
1 Ovidius University of Constanta, 124 Mamaia Avenue, Constanta, Constanta, Romania 900527
2 Academy of Romanian Scientists, Splaiul Independentei No. 54, Bucharest 050094, Romania
3 National Institute for Lasers, Plasma and Radiation Physics, P.O. Box MG-36, 077125 Bucharest Romania
4 University Politehnica of Bucharest, Faculty of Applied Chemistry and Material Science, Department of Oxide Materials and Nanomaterials, No. 1–7 Gh. Polizu Street, Bucharest 011061, Romania
5 National Institute for Materials Physics, Atomistilor No. 405, 077125, Magurele, Romania
6 CERONAV Constanta, Pescarilor Street no. 69A, 900581 Constanta, Romania
PUBLISHED in Annals of the Academy of Romanian Scientists Series on Physics and Chemistry, Volume 7, No1